Speakers

MEMS×AI×Robotics

Isao Shimoyama

Professor Emeritus of the University of Tokyo, Japan

Robot system integrators build systems by incorporating existing sensors. Integrating sensors that are widely available on the market into robotic systems poses no particular difficulty. However, innovative new sensors face significant barriers to adoption in robotic systems due to high costs resulting from low procurement volumes and the lack of a proven track record.

By integrating force-sensing sensors developed by our research team through many years of research into robotic systems, we demonstrate the feasibility of creating robots equipped with skin-like physical sensing capabilities in their legs and body. Specifically, this enables robots to walk on slippery surfaces, stably grasp tools with their hands, and endow robots with force perception.

Furthermore, to reduce manufacturing costs as well as computational and communication costs, we propose an implementation method for locally processing information from a large number of sensors.

Silicon Photonic MEMS for Sensing and Networking Applications

Ming Wu

Professor of the University of California, Berkeley, USA

Optical interconnect plays an increasingly important role in data centers and high-performance computing systems. As the I/O bandwidth continue to grow exponentially, traditional electronic switches become the bottleneck of the interconnect network. Optical switching provides direct optical connections between processors with low power consumption, low latency, and unlimited bandwidth. Previously, high radix optical switches can only be made using free space optics. In this talk, I will introduce silicon photonic MEMS (micro-electro-mechanical systems) technology. By integrating MEMS switching elements with silicon photonics, high-radix switches can be integrated on a single chip. In addition to data center networks, high-radix switches also enable a new type of solid state LiDARs. I will discuss our recent work on solid state LiDARs with focal plane switch arrays.

Intelligent Electrical and Optical Sensing Platforms for AI-Assisted Molecular Detection

Seong Chan Jun

Professor of Yonsei University, Republic of Korea

Molecular sensor systems often face challenges from electrical noise or optical miniaturization limits, hindering rapid and precise analysis. This work presents an artificial intelligence (AI)-driven platform that evaluates both electrical and optical signals. By employing dedicated nanomaterial sensors optimized for each method, the system combines high electrochemical sensitivity with the structural specificity of optical analysis. These distinct pathways ensure comprehensive molecular profiling without signal interference. Data integration is performed at the software level, where machine learning algorithms cross-validate the outputs. The AI isolates subtle signals from noise, recognizing patterns that single-modality systems might miss. This enables accurate, real-time identification of target molecules, from biochemical substances to trace exhaled gases. This framework provides a robust solution for complex molecular analysis by linking specialized hardware with data-driven validation.

Precision Diagnostics Anywhere: Digital Partitioning, Melt Coding, and Magnetofluidic Automation – From Infection/AMR to Epigenetic Cancer Detection

Tza-Huei (Jeff) Wang

Louis M. Sardella Professor of the Johns Hopkins University, USA

Precision medicine depends on molecular measurements that are sensitive, multiplexed, and actionable on the timescale of clinical decision-making. Yet many genetic and epigenetic assays remain too slow, costly, or infrastructure-dependent to be used routinely at the point of care or in low-resource settings. In this talk, I will present micro/nano-enabled diagnostic systems that convert complex molecular assays into portable, affordable, sample-to-answer workflows.

The core strategy integrates three complementary elements: (i) digital partitioning in microfluidic arrays and droplets to detect rare targets, achieve single-molecule/single-cell sensitivity, and resolve biological heterogeneity; (ii) melt‑coded sensing as an information-rich transducer that enables compact multiplexing with simplified optical hardware; and (iii) magnetofluidic automation using magnetic beads to integrate nucleic acid extraction, washing, and amplification/detection in low-cost cartridges with portable instrumentation. I will highlight applications spanning two time-critical clinical needs: rapid pathogen identification with antimicrobial resistance testing to guide evidence-based therapy, and high-precision DNA methylation analysis for early cancer detection from scarce circulating DNA. Together, these examples illustrate how digitization, melt coding, and cartridge automation can help democratize precision diagnostics by bringing actionable molecular results closer to patients.

From Skin to Machine: Nanogenerators for Energy Harvesting, Wound Healing, and Thermal Perception

Hoe Joon Kim

Professor of DGIST, Korea

Human skin is nature's ultimate multifunctional interface — harvesting ambient energy, responding to mechanical stimuli, and perceiving thermal landscapes with remarkable sensitivity. Inspired by this biological blueprint, this keynote presents our laboratory's advances in flexible nanogenerator systems spanning triboelectric (TENG), piezoelectric (PENG), and pyroelectric transduction mechanisms. We first highlight key developments in self-powered platforms and their application in electrical wound healing, where device-generated electric fields actively promote tissue regeneration without external power sources. The talk then turns to our central theme: pyroelectric-effect-based artificial thermal perception. By engineering flexible pyroelectric polymer films into sensing arrays, we demonstrate skin-analogous thermal discrimination, including contact thermal conductivity mapping, transient thermal event detection, and spatiotemporal temperature imaging, functions that closely mirror thermoreceptor networks in human dermis. Together, these results illustrate how a unified transduction framework, rooted in the same material physics, can simultaneously power, heal, and sense: charting a roadmap toward self-powered, multisensory artificial skins for prosthetics, rehabilitative medicine, and soft robotics.

Enabling Next-Generation AI Edge Devices: Solid-State MEMS Speakers and Micro-Cooling Solutions

Chester Hwang

As AI-powered solutions incorporated into smart glasses, mobile phones and wearables, they face intense thermal and audio integration constraints that traditional components cannot solve. This talk presents solid-state PiezoMEMS technology to address these challenges, specifically focusing on ultra-thin (<1.5 mm) MEMS speakers and piezo-based micro-cooling ("fan-on-a-chip") solutions. By replacing conventional moving-coil drivers, piezoelectric MEMS speakers (e.g., the xMEMS Sycamore product family) utilize an ultrasonic diaphragm platform to generate full-band, high-fidelity audio. This revolutionary "sound-from-ultrasound" principle employs ultrasound modulation to convert audio signals into ultrasonic air pulses, which are then demodulated acoustically into clear, rich sound. This architecture enables packages capabe of 70% smaller and 90% lighter, facilitating natural sound in open-ear devices. Concurrently, piezoelectric µCooling solutions deliver silent, vibration-free localized cooling, reducing surface temperatures by up to 40% and increasing processing margins by 70% to eliminate thermal throttling. Together, these technologies enable thinner, lighter devices that support advanced, continuous AI workloads. Expected in mass production by 2026, these solid-state solutions mark a pivotal advancement in all-day AI wearable design.

Bridging Profiling and Monitoring: High-Precision Micro-GC for Full-Spectrum VOCs

Jung Hwan Seo

Professor of Hongik University, Korea

Gas chromatography (GC) is essential for analyzing complex gas mixtures, yet conventional systems struggle to bridge the gap between high-resolution profiling and rapid monitoring. To address this for full-spectrum volatile organic compounds (VOCs), high-precision micro gas chromatography (μ-GC) has emerged as a powerful portable solution. In μ-GC, the micro separation column is critical to overall system performance. This study presents an innovative μ-GC column utilizing high-aspect-ratio (HAR) micropillar arrays, fabricated as black silicon via Deep Reactive Ion Etching (Deep RIE). These black silicon micro rods drastically increase the interactive surface area, enhancing analyte-stationary phase interactions. Consequently, this design improves separation resolution by at least 51% and enhances peak identification compared to traditional rectangular columns. By delivering exceptional separation efficiency within a compact form factor, this high-precision column successfully enables simultaneous detailed VOC profiling and real-time monitoring, overcoming traditional analytical trade-offs for diverse applications including chemical safety.

Laser-Induced Graphene–Based All-Solid-State Potentiometric Biosensing Platforms for Smart Health, Food, and Water Monitoring

Nipapan Ruecha

Research Professor of Chulalongkorn University, Bangkok, Thailand

Miniaturized and field-deployable sensing platforms are increasingly required for decentralized diagnostics in healthcare, food safety, and environmental monitoring. All-solid-state potentiometric sensors offer key advantages, including simple instrumentation, rapid response, and compatibility with portable electronics. However, improving potential stability and ion-to-electron transduction efficiency remains a critical challenge. Recent advances in our research establish laser-engineered and printable potentiometric platforms based on laser-induced graphene (LIG). A CO₂ laser enables direct, mask-free fabrication of porous graphene electrodes with digitally controlled architectures. Sensor performance is further enhanced through nanomaterial integration, including in situ laser-synthesized gold nanoparticles and nanocomposite solid contacts, leading to improved electroactive surface area and signal stability. Ion-flux-based transduction mechanisms are combined with selective biological recognition elements such as antibodies and aptamers for rapid, label-free detection of pathogens in water and food matrices. In addition, dual-ion microfluidic devices for simultaneous Na⁺/K⁺ monitoring and hydrogel-integrated paper-based sensors are demonstrated. Coupling with portable potentiostats and smartphone interfaces enables real-time, on-site analysis. These laser-fabricated solid-state electrochemical systems provide versatile platforms for smart and sustainable diagnostics.

AI-Augmented Wearable Bioelectronics: A Flexible, Sweat-Based Glucose Monitoring System for Precision Diabetes Management

Nadnudda Rodthongkum

Assist. Professor of Chulalongkorn University, Bangkok, Thailand

This work presents an integrated, flexible, and wearable electrochemical biosensing platform designed for non-invasive, real-time sweat glucose monitoring—offering a seamless alternative to invasive blood sampling. The sensing interface utilizes a synergistically engineered nanocomposite of Prussian blue (PB), carbon nanotubes (CNTs), and cellulose nanofibers (CNF), functionalized with glucose oxidase (GOx) to maximize electroactive surface area and catalytic sensitivity. Morphological and electrochemical characterization via SEM and amperometric H2O2 detection confirmed superior charge-transfer kinetics and structural stability.The biosensor is integrated into a customized, miniaturized potentiostat system embedded within a wearable waist-strap, featuring seamless Bluetooth connectivity for real-time smartphone-based analytics. The device exhibits a highly linear response (0–1.2 mM) with a limit of detection (LOD) of 0.1 mM, enabling the precise distinction of diabetic conditions using a clinical cut-off of 0.3 mM. To optimize the sensing architecture, Machine Learning (ML) regression models were deployed to map the complex correlations between nanomaterial composition, PB electrodeposition cycles, and peak current responses. This ML-driven optimization provides a predictive framework for high-performance sensor design, bypassing traditional trial-and-error methods. Finally, the platform was validated through clinical trials with human volunteers and diabetic patients, yielding results that correlate strongly with standard diagnostic methods. This work establishes a scalable, smartphone-integrated framework adaptable for multi-analyte sweat biomarker detection and next-generation decentralized disease screening.

Beyond Piezoelectric Self-Sensing: Integrated Silicon Stress Sensors for Robust Feedback in Piezoelectric MEMS

Andrea Vergara

Assist. Professor of Tohoku University, Japan

Piezoelectric MEMS actuators are attractive for micromirrors, tunable lenses, ultrasonic transducers, and other precision microsystems because of their large force, compact size, and low power consumption. However, accurate feedback control remains challenging, particularly in static or low-frequency operation where conventional piezoelectric self-sensing suffers from charge leakage, hysteresis, and poor long-term stability. This talk presents our recent work on integrating alternative silicon-based stress sensors directly beneath piezoelectric MEMS actuators, enabling robust closed-loop operation without relying on the piezoelectric layer itself as the sensing element. We first discuss buried piezoresistive sensors, where optimized buried structures improve drift stability and compatibility with PZT thin-film processing while preserving sufficient sensitivity for static position readout and hysteresis compensation in devices such as micromirrors and varifocal liquid lenses. We then introduce our emerging work on piezo-zener (PZZ) stress sensors, in which stress-induced modulation of diode breakdown characteristics offers reduced thermal coefficient, weaker crystal orientation dependence, and improved robustness to process variations. Although challenges remain in sensitivity optimization and bias voltage requirements, PZZ devices open a promising pathway toward highly reliable integrated sensing for next-generation piezoelectric MEMS.

Aptamer-functionalized Quartz Crystal Microbalance Sensor Integrated with Loop-Mediated Isothermal Amplification for Dengue Virus Detection

Dharmatov Rahula B. Albano

Professor of University of Santo Tomas, Philippines

Dengue fever remains a major global health concern, particularly in resource-limited regions where rapid and accurate diagnostics are essential. Conventional methods such as polymerase chain reaction (PCR) and enzyme-linked immunosorbent assays (ELISA) offer high sensitivity but require complex instrumentation, extended processing times, and skilled personnel. Loop-mediated isothermal amplification (LAMP) provides a rapid alternative; however, it is susceptible to false-positive results due to non-specific amplification. In this study, a thiolated aptamer-functionalized Quartz Crystal Microbalance (QCM) sensor integrated with LAMP was developed for the selective detection of the dengue virus (DENV) 3′ untranslated region (UTR). The aptamer was immobilized onto a gold-coated quartz crystal via gold–thiol self-assembly, enabling specific target recognition. LAMP-amplified products were introduced to the QCM sensor, where hybridization induced measurable frequency shifts corresponding to mass changes on the sensor surface. The platform demonstrated high specificity, effectively distinguishing true positives from false-positive LAMP signals, with positive samples producing consistent frequency shifts (36.3–37.9 Hz) and negative samples showing negligible responses (<0.53 Hz). A strong linear relationship between frequency shift and target concentration was observed over 10–100 pM (R² = 0.9813), with a limit of detection of 0.85 pM. The integration of QCM with LAMP enhances diagnostic reliability while maintaining rapid and cost-effective detection, highlighting its potential for point-of-care applications and adaptability for detecting other viral pathogens through aptamer modification.

Physical Reservoir Computing with a Biaxial Resonant MEMS Accelerometer

Alberto Corigliano

Professor of Politecnico di Milano, Italy

New forms of edge computing are emerging, enabling embedded processing of external stimuli. Physical Reservoir Computing (PRC) is a hybrid computational approach designed to handle sequential data and capture temporal dependencies, similarly to an analog recurrent neural network. External inputs are fed into a nonlinear physical reservoir, which maps the input dynamics into a high-dimensional state space. Task-relevant information is then extracted using a simple trainable linear readout, reducing training complexity. MEMS-based systems have been proposed as physical reservoirs, exploiting the mechanical nonlinearities of both resonators and accelerometers. In this work, we explore a differential biaxial resonant accelerometer as a PRC platform, with the aim of assessing single-ended and differential readout configurations and evaluating benchmark tasks involving multi-dimensional input signals. The feasibility of the proposed platform has been preliminary verified through numerical simulations. The system consists of an accelerometer acting as the physical reservoir, analog circuitry for MEMS actuation and readout, and digital electronics for mask generation and signal processing. It is capable of processing both single and multi-axial acceleration inputs. The proposed architecture enables the comparison between single-ended and differential readout configurations, as well as the investigation of PRC performance in single- and multi-task inference scenarios, including preliminary multi-task configurations. A novel readout chain based on synchronous demodulation followed by envelope detection is employed, achieving a simulated mean squared error (MSE) below 0.1 for parity depth 4 and below 0.4 for parity depth 5.

Stress-Engineered Multilayer Membrane Platform for Stable Microheaters

Manu Garg

Senior Research Engineer of Silicon Austria Labs GmbH, Austria

Thermomechanical MEMS devices involving suspended membranes and beams inherently experience residual and thermal stress post-release, which critically affect device stability and reliability. Residual stress originates from grain growth, nucleation, and morphological layer build-up during deposition, while thermal stress mainly arises due to the coefficient of thermal expansion (CTE) mismatch between multilayers in a stack. By careful selection of materials and intrinsic stress tuning, released membranes with desired stress can be obtained. In this talk, a stress-engineered multilayer membrane platform is presented for achieving highly stable MEMS microheaters. The platform consists of silicon oxynitride (SiNxOy)/silicon nitride (SiNx) stack integrated with a molybdenum (Mo) heater, where intrinsic stress tuning enables precise control of membrane deformation post-release. The optimized microheater platform is realized on 200 mm wafers and systematically characterized, showing improved structural stability and thermal robustness. The presented approach provides a scalable pathway toward reliable MEMS platform for sensing and photonic applications, and opens new directions for stress-aware design of multilayer microstructures.

Towards Ultra-Low-Power and Intelligent Gas Sensing Technologies for Mobile and IoT Applications

Incheol Cho

Assist. Professor of Tech University of Korea, Korea

The increasing demand for real-time air quality monitoring in mobile and IoT applications necessitates gas sensors that combine ultra-low power consumption with high sensitivity and selectivity. This work presents the evolution of gas sensor technologies addressing the limitations of conventional semiconductor metal oxide (SMO) sensors through innovative sensing platforms. Initially, MEMS microheater platforms were developed, where extreme scaling and precise integration of high-sensitivity nanomaterials enable milliwatt-level power consumption. To further mitigate the thermal and reliability constraints of heater-based systems, a photoactivated sensing platform integrated with micro-LEDs is introduced, achieving sub-milliwatt operation with improved mechanical durability. The scope is then extended to intelligent electronic nose systems, where deep learning algorithms analyze responses from sensor arrays or transient signals from individual sensors to enhance selectivity. Through advanced pattern recognition, highly accurate gas identification and quantification are realized. These synergistic combination of nanomaterials, MEMS/micro-LED platforms, and AI promises next-generation, ultra-low-power intelligent gas sensing systems for mobile and IoT applications.

Flexible Sensors and Actuators Through Rational Design of Microstructures

Yongrok Jeong

Assist. Professor of Kyungpook National University, South Korea

Flexible sensor and actuator technologies enable efficient utilization of sensing and actuation systems across a wide range of environments, particularly in human-centered applications. These technologies are actively being adopted in fields such as wearable devices, biomedical systems, and soft robotics. Beyond conventional devices that merely exhibit mechanical flexibility, there is a growing demand for high-performance flexible sensors and actuators. This study addresses such demands through the optimization of microstructures. First, the key functional requirements – such as pressure sensing, pressure calibration via simultaneous temperature and pressure sensing, and flexible robotic actuation – were identified. For flexible pressure sensors, optimization of the contact interface in contact-resistive pressure sensing mechanisms was performed. By optimizing the microstructured contact surface, both the sensing range and sensitivity of the pressure sensor were significantly improved. Based on these results, practical pressure sensors were fabricated and experimentally validated. Furthermore, the developed sensors were integrated into various wearable and medical systems, demonstrating their applicability in real-world scenarios. For flexible actuator films, the actuation range was optimized through the structural design of microstructures. This approach enabled the development and operation of enhanced flexible actuator films with improved performance characteristics.

Single-Cell Molecular Assays via Discrete Droplets and Continuous Hydrogel Matrices

Shih-Kang Fan

Professor of Kansas State University, USA

Accurate molecular analysis and single-cell quantification of nucleic acids are essential for pathogen detection, early disease diagnostics, and rare mutation analysis of biological heterogeneity. This talk presents two complementary PCR-based strategies—emulsion droplet digital PCR (ddPCR) and hydrogel-based amplicon colony formation—that enable robust, absolute quantification without reliance on external calibration. In the discrete droplet approach, samples are partitioned into tens of thousands of monodisperse microreactors. Individual DNA templates or cells are isolated and amplified independently, allowing for Poisson-based quantification with high sensitivity and low background. Conversely, the continuous hydrogel-based system performs in situ amplification within a nanoporous matrix, generating spatially localized amplicon colonies that preserve single-cell context. The droplet platform enables high-throughput detection of rare genetic variants in liquid biopsy samples, while the hydrogel system provides a direct molecular readout from intact cells in cytological preparations. Key technical innovations include electrokinetic droplet generation for rapid, uniform partitioning and engineered hydrogel chemistries for localized amplification and multiplexed fluorescence encoding. These developments provide a validated platform for nucleic acid quantification at single-template resolution, offering new capabilities for integrating molecular and cellular information. This work has broad implications for precision diagnostics, potentially enabling earlier disease detection, and a deeper understanding of cellular heterogeneity in cancer and other diseases.

Optical Metasurfaces for Ultrasensitive, Label-free and Real-time Biosensing

Haogang Cai

Assist. Professor of New York University, USA

Optical metasurface-based biosensors integrated with microfluidics represent a key platform technology for biosensing and diagnostics. Despite advances over the past decades, there are still substantial obstacles to widespread implementation, including the fundamental trade-off between high sensitivity and high Q factors, and the strong reliance on sophisticated and costly top-down lithographic techniques. Here, we present two novel meta-sensors for ultrasensitive, label-free, and real-time biosensing in the visible spectrum: (1) a high-Q dielectric metasurface fabricated by electron beam lithography support symmetry-protected toroidal quasi-bound states in the continuum (q-BIC) modes; (2) a scalable plasmonic metasurface fabricated by high-throughput nanosphere lithography. By engineering the three-dimensional spatial distribution of enhanced fields, the Si q-BIC metasurface simultaneously achieved both high Q and sensitivity, which are typically in trade-off. Exemplified by gold nanohole arrays via the self-assembly approach of nanosphere lithography, our scalable meta-sensors achieved sensing performance comparable to devices manufactured by top-down lithographic techniques. Both meta-sensors are compatible with cost-efficient optical setups using incoherent visible light sources and compact medium- to low-resolution spectrometers. The outstanding sensing performance, robustness and scalability pave the pathway toward broad adoption of meta-optic and nanophotonic biosensors for translational applications.

Bringing Nano-Tactile Intelligence into Practice

Hidekuni Takao

Professor of Kagawa University, Japan

Touch strongly influences human judgments, but smoothness, friction, hardness, moistness, and cold/warm sensation remain difficult to measure objectively. This invited talk presents silicon MEMS nano-tactile sensors that quantify such “invisible touch” by converting micro/nano-scale contact phenomena into high-density data. With micron-scale contactors, compliant suspensions, and piezoresistive readout, the sensors acquire surface topography, friction, hardness, contact force, and thermal cues with sensitivity and spatial resolution beyond the human fingertip. The central message is that super-human tactile sensing emerges when device physics, system design, and AI are integrated. Combined with deep learning, our system discriminates 14 types of tissue paper in real time with 98% accuracy, demonstrating a transition from tactile measurement to tactile intelligence. Two frontiers will be highlighted. In medicine, a tool-channel tactile sensor that passes through a flexible endoscope simultaneously acquires contact pressure and surface hardness in narrow spaces, enabling “palpation beyond the fingertip.” In beauty and healthcare, a hair texture diagnosis system visualizes cuticle conditions by tactile scanning, extracts damage-related features, and has been translated into a practical cuticle diagnostic system. I will also discuss monolithically integrated hair guides, application-specific handheld scanners, and measurements of surfaces from ice and skin to precision-machined parts, fabrics, and automotive interiors. These examples position nano-tactile sensing as a physical translator between hidden surface phenomena, human perception, AI interpretation, and real-world innovation.

Non-volatile control for nano-optomechanical phase change metasurface

Jun-Yu Ou

Assoc. Professor of University of Southampton, UK

Non-volatile tuning of mechanical resonators is a long-standing challenge, as most existing techniques require continuous external stimuli to maintain a modified mechanical state. Phase-change chalcogenide materials offer a unique opportunity to overcome this limitation by enabling reversible yet persistent changes in mechanical and optical properties. Here, we demonstrate a nano-opto-mechanical metasurface integrated with a phase-change chalcogenide material whose intrinsic mechanical resonance frequency can be non-volatilely modulated through phase transitions in Ge2Sb2Te5 (GST).

This work establishes a new class of phase-change-enabled nano-opto-mechanical metasurfaces for ultralow-power applications and paves the way for non-volatile tuning of nanomechanics.

Temperature, Oxygen and Stress Measurement using Phosphor Microparticles

Kyung Chun Kim

Professor of Pusan National University, Korea

Inorganic phosphorescence-based sensing technology provides the opportunity to obtain non-contact temperature, oxygen, and stress information in microfluidics. However, given the dual quenching effects of temperature and oxygen, the sensing of oxygen environments using inorganic phosphorescence usually requires constant temperature conditions or accurate temperature information as a reference. Herein, a simultaneous sensing technique of oxygen and temperature is proposed in this study to achieve accurate quantitative sensing of oxygen concentration using phosphor microparticles. We clarified theoretically that the rise and decay behavior of phosphorescence will be affected by both oxygen concentration and temperature due to the effect of oxygen quenching and thermal quenching and verified that both the rise and decay constant of the phosphorescence were sensitive to oxygen and temperature. Stress sensing is possible using SAOED microparticles. A binary equation model was then established to obtain the temperature and oxygen concentration information. The experimental results demonstrate that quantitative two-dimensional sensing of oxygen concentrations and stress field in high-temperature environments can be achieved using the current method with only UV light and a high-speed camera. The current study promises a simple, easy-to-operate, and low-cost oxygen sensing method, which provides a reference for the development of high-precision optical temperature, oxygen, and stress sensing technology even in high-temperature environments.

Continuous analysis of mechanical and biological properties of a single cell using MEMS tweezers

Momoko Kumemura

Assist. Professor of Kyushu Institute of Technology, Japan

Tumor cells change their characteristics during Epithelial-mesenchymal transition (EMT). Epithelial cells maintain their position among surrounding cells, while mesenchymal cells exhibit high mobility and infiltration capacity [1]. Many mechanical measurements of cells in the body, including kidney cancer cells and breast cancer cells, are reported; in most cases, tumor cells show lower Young’s modulus or higher deformability, with a few exceptions [2]. In cancer diagnosis, one approach is to measure specific proteins quantitatively or to perform genetic testing. Recent advances in gene expression analysis have made it possible to obtain analytical data from single cell or parts of cell. So far, a technique to determine the relationship between mechanics and tumor-related genes has been lacking. Using MEMS tweezers, we are conducting a correlation analysis between single-cell mechanics and gene expression levels of genes of the cytoskeleton or tumor-related genes. In this presentation, I will introduce the experimental method and some basic results.

Toward Thermally Intelligent Power Module Packaging: Thermal Path Engineering and Junction Temperature Estimation

Sang Won Yoon

Professor of Seoul National University, Korea

As power conversion systems adopt wide bandgap (WBG) power devices to leverage their fast switching capabilities and achieve higher power density, power module packaging has transitioned from a passive support into a primary design factor. This talk introduces the concept of thermally intelligent package approaches for power modules, which focuses on the synergy between thermal path engineering and device junction temperature estimation. First, we discuss how package-level thermal challenges are defined and how heat-flow paths can be engineered to mitigate elevated device temperatures and mutual heating in various module structures. By optimizing the package-level design, the thermal performance of the packaged devices can be more effectively managed. Second, we explore a framework for real-time thermal awareness. This approach discusses data acquired from multiple sensing elements to acquire high-fidelity data under realistic operating conditions. To process these datasets, we employ methods such as deep-learning-based modeling and iterative estimation techniques, enabling the prediction of the actual junction temperature in multichip power modules. This integrated perspective provides a practical framework for the reliable operation of next-generation power electronics.

Manipulation and Sensing of Oxygen Microenvironment in Advanced in vitro Cell Culture Models

Yi-Chung Tung

Research Fellow of Academia Sinica, Taiwan

Oxygen tension is a fundamental driver of both physiological and pathological cellular behaviors. While microfluidic platforms offer superior environmental control, achieving precise oxygen manipulation and high-resolution characterization remains a challenge. This talk introduces a spatially confined chemical reaction method developed in my lab to generate on-demand oxygen gradients. This approach is compatible with standard incubators and avoids common issues like bubbling or medium instability. I will discuss its application in studying cancer cell migration, 3D endothelial network formation, and sprouting angiogenesis. Additionally, I will present an advanced oxygen-sensing scheme utilizing frequency domain fluorescence lifetime imaging microscopy (FD-FLIM). Unlike intensity-based methods, FD-FLIM is insensitive to ambient noise and simplifies the calibration process. We demonstrate the utility of this sensing method through 2D and 3D oxygen tension measurements within microfluidic devices. By combining enhanced oxygen control with accurate sensing, these platforms enable the construction of sophisticated organ-on-a-chip models for both fundamental and translational research.

Iontophoresis Patch with Bipolar Porous Microneedles for Transdermal Dual Delivery

Matsuhiko Nishizawa

Professor of Tohoku University, Japan

Transdermal dual delivery of drugs offers multiple benefits in therapeutic outcomes and the prevention of transmissible diseases. Here, we propose a versatile iontophoresis-driven porous microneedle (PMN) patch for the dual delivery of drugs regardless of the charge or size of molecules. By utilizing the combination of anionic and cationic modifications of the inner wall of PMNs, the directions of electroosmotic flow (EOF) can be aligned at both anode and cathode compartments owing to the preferential movement of mobile cations (or anions) in the fluid conduits with fixed anions (or cations) with applied current. The EOF-assisted dual delivery of dextran has been demonstrated.

Advanced Acoustic Delay Lines for RF Signal Processing

Ming-Huang Li

Assoc. Professor of National Tsing Hua University, Taiwan

Piezoelectric acoustic devices are promising building blocks for modern radio-frequency (RF) communication systems because of their low loss, excellent frequency selectivity, and compact footprint. Among them, acoustic delay lines (ADLs) provide unique time-domain signal processing capabilities and can be integrated as compact passive delay elements in chip-scale RF architectures for transversal filters, oscillators, nonreciprocal networks, acoustoelectric signal processors, and delay synthesizers. Thin-film lithium niobate-on-insulator (LNOI) has recently emerged as an attractive platform for high-performance ADLs, benefiting from its large electromechanical coupling, frequency scalability, mechanical robustness, strong power handling, and compatibility with scalable fabrication. This work presents recent progress in LNOI-based ADLs and explores their opportunities in advanced RF signal processing.

Flexible and Conformal PMUT Arrays with Acoustic Focusing Based on Hydrothermal PZT Thin Films

Guo-Hua Feng

Professor of National Tsing Hua University, Taiwan

This talk introduces a flexible piezoelectric micromachined ultrasonic transducer (PMUT) array utilizing a low-temperature bottom-up fabrication approach. High-performance lead zirconate titanate (PZT) thin films were synthesized directly onto flexible titanium foil substrates using a hydrothermal process at 180°C, ensuring full compatibility with thermally sensitive materials. X-ray diffraction confirmed a phase-pure perovskite structure with a remnant polarization of 2 μC/cm². To suppress electrode shorting from surface roughness, an SU-8 passivation layer was incorporated, adjusting the composite Young's modulus from 50.2 GPa to 72.5 GPa. Laser Doppler vibrometry verified that the 3×3 parallel array exhibited resonance clustering near 26 kHz and substantial out-of-plane displacements up to ~2 μm. When integrated onto a 15 mm radius curved fixture, the flexible array exploited geometric acoustic focusing, yielding a peak sound pressure level of 78 dB at 2 cm. This represents a 2 dB gain and a tighter forward radiation pattern than its planar counterpart, demonstrating a highly competitive pathway for flexible ultrasonic arrays in conformal sensing systems. Furthermore, this robust integration strategy successfully demonstrates how acoustic field manipulation can be tailored for non-planar electronics, opening new possibilities for personalized wearable ultrasound patches and non-destructive structural health monitoring.

Listening to Microdroplets: Acoustic Voiceprint Features for Label-Free Microfluidic Monitoring

Chia-Hung Dylan Tsai

Assoc. Professor of National Yang Ming Chiao Tung University, Taiwan

Microfluidic droplet systems have become an important platform for applications including biomedical analysis, material synthesis, and cell engineering. Precise monitoring of droplet generation is essential for ensuring system stability and quality. Conventional approaches mainly rely on optical imaging systems, which often require high-speed cameras, complex illumination setups, and significant computational resources. This talk presents a label-free and non-contact monitoring approach based on acoustic voiceprint features generated during microdroplet formation. When droplets are generated, the coupled interactions among fluid flow, interfacial dynamics, and surrounding air naturally produce characteristic acoustic signals. By analyzing these acoustic signatures, important information regarding droplet generation states can be extracted in real time. The presentation will introduce the fundamental mechanism of sound generation during droplet formation and discuss how voiceprint features can be correlated with droplet behaviors under different operating conditions. Experimental studies involving coaxial microfluidic systems and double emulsion generation will be presented, together with signal processing and machine learning approaches for droplet identification and monitoring. The possibility of introducing external acoustic excitation or air-assisted methods for weak-signal systems will also be discussed. The proposed method offers advantages including low cost, compact implementation, reduced data bandwidth, and the potential for integration into portable or industrial microfluidic platforms. The work demonstrates how “listening” to microfluidic systems may provide a new direction for real-time sensing and intelligent monitoring in next-generation microfluidic technologies.

New Functionalities for Perovskite Ferroelectric Oxides

Wook Jo

Professor of Ulsan National Institute of Science and Technology, Korea

Perovskite oxides have been widely investigated in the discipline of materials science and engineering due to their exceptionally useful functional properties such as huge dielectric permittivity, ferroelectricity, and superconductivity as well as catalytic activities. Efforts have been made for decades intensively to optimize those functional properties to meet the needs for applications. It means that any further improvement of them has become much sluggish and cost-ineffective these days, waiting for breakthroughs for the discipline to move forward. This is especially true for implementing coupled multifunctionality into a single perovskite oxide system. In this talk, we would like to show how to create new functionalities reinforced to the existing ones. An emphasis is put on realizing multifunctionalities that physically contradict each other from the conventional sense. Furthermore, we will show how the newly introduced functionality can be coupled with the existing one. This attempt will be illustrated exemplary with a creation of ferromagnetism directly coupled to the existing ferroelectricity and optical transparency superimposed onto piezoelectricity. In addition, we want to share our strategy for the realized functionalities to be practically viable.

Low-Cost Centimeter-Scale 3D-Printed Mirror Scanners

Jui-che (Ted) Tsai

Professor of National Taiwan University, Taiwan

In this talk, several low-cost centimeter-scale mirror scanners of various designs will be presented. These scanners are fabricated with table-top inexpensive 3D printers. They can be a low-cost alternative to the high-priced conventional galvanometer scanners.

Self-Healing and Self-Powered Intelligent E-skin Systems

Ching-Te Kuo

Assoc. Professor of National Sun Yat-sen University, Taiwan

The development of wearable healthcare electronics and intelligent human–machine interfaces requires electronic skin (e-skin) systems with high mechanical durability, autonomous sensing, and sustainable energy operation. Here, we focus on the recent advances in self-healing conductive polymers and self-powered tribo-electromagnetic nanogenerators (TEMNGs) for intelligent e-skin applications. A self-healing conductive polymer matrix, Gr-PBSM, exhibits exceptional stretchability (>1260%), rapid room-temperature self-healing, and stable conductivity even at −20 °C. The material enables sensitive detection of body motion, muscle activity, and arterial pulse waves while accurately resolving key cardiovascular features. In parallel, a high-output TEMNG based on laser-engineered microstructured PVC films enables simultaneous harvesting of biomechanical and ambient electromagnetic energy. The platform continuously powers wearable electronics while supporting real-time gait sensing and biomechanical monitoring. By integrating triboelectric gait signatures with AI, the system achieves 99.5% user-authentication accuracy. These integrated technologies establish a multifunctional e-skin platform combining self-healing capability, hybrid energy harvesting, physiological sensing, and AI-enhanced analytics for next-generation wearable healthcare, rehabilitation, and soft robotic systems.

Ultrafast Laser Nanoscale 3D Printing and Micromachining for Photonics, Sensing, and Energy Storage

Po-Han Huang

Assist. Professor of National Tsing Hua University, Taiwan

The performance and functionality of microsystems are fundamentally shaped by microfabrication technologies. While conventional microfabrication, based on the patterning and stacking of planar structures, has been highly successful in electronics, it remains limited in its ability to produce freeform three-dimensional architectures and to process advanced materials essential for emerging microsystems in applications such as photonics, sensing, and energy storage. These limitations have motivated the development of alternative manufacturing approaches capable of high-resolution, maskless, and truly three-dimensional fabrication. Among these approaches, ultrafast laser processing has emerged as a powerful tool. With pulse durations in the femtosecond regime, ultrafast lasers enable highly localized multiphoton absorption in target materials with minimal thermal effects, allowing precise modification of a wide range of materials for nanoscale 3D printing and micromachining through processes such as crosslinking and ablation. In our group, leveraging these capabilities, we have successfully developed approaches for post-processing-free, highly integrable nanoscale 3D printing of glass materials and micromachining of inkjet-printed conductive composites on flexible substrates. Using these approaches, we have demonstrated a range of microsystems, including 3D photonic resonators, optical fiber-tip chemical sensors, and high-performance microsupercapacitors. In this talk, I will introduce ultrafast laser–matter interactions and their advantages for micro- and nanofabrication, and present recent progress in our work.

Next-Generation Gallium Oxide Semiconductors for Broadband Ultraviolet Photodetectors

Shih-Hung Lin

Professor of National Yunlin University of Science and Technology, Taiwan

Ultraviolet (UV) light is essential across biomedical, sterilization, and industrial fields, yet its invisibility poses severe health risks that demand highly sensitive, fast, and broadband detection. Traditional UV sensors are often limited by narrow wavelength detection and persistent photoconductivity, which triggers response hysteresis and signal drift. To overcome these bottlenecks, our research introduces a manufacturable, oxide-based UV sensing platform engineered for high-sensitivity broadband detection. By leveraging scalable, low-cost radio-frequency magnetron sputtering combined with high-temperature thermal diffusion, we can precisely tune the thin-film bandgap by adjusting the indium-to-gallium ratio or gallium-to-aluminum ratio, and optimization annealing conditions. This breakthrough enables a simple material system to seamlessly span the entire UVA to UVC spectrum within a stable metal–semiconductor–metal photodetector. Ultimately, this work establishes a reproducible fabrication and verification standard that bridges the gap between laboratory research and industrial application. By utilizing this cost-effective, wavelength-tunable manufacturing process, our research advances green technology and fosters cross-disciplinary talent to accelerate the standardization and industrialization of next-generation UV sensing technologies.

Ultra-compliant Brain-Machine Interfaces

Wei-Chen Huang

Assoc. Professor of National Yang Ming Chiao Tung University, Taiwan

Design and fabrication of multifunctional biointerfaces is beneficial for the development of next-generation brain-machine interfaces (BCI). Precise controlling over the chemical and physical cues of biomaterials can create bioactive BCI that in turn permits the efficient promotion on the local tissues repair or regeneration. Meanwhile, it can also provide unique functions such as anti-inflammatory protection, stem cell transplantation, and drug delivery to improve the implanted BCI. For the development of ultra-compliant invasive/noninvasive neural microelectrode arrays, the strategies cover new biomimetic materials development, pathfinding of nonconventional microelectronic fabrication techniques, and heterogeneous integration of different electronic components. In this talk, we will highlight the implement of our as-developed BCI devices in treating different disease models including peripheral nerve injury and brain disorders including epilepsy and stroke. We believe that next-generation bioelectronic interfaces will provide seamlessly physical and biochemical match with nerve tissues to exhibit unprecedented functionality and reliability.

MEMS-Based Tri-IDT Surface Acoustic Wave Atomizer for Miniaturized Aerosol

Chien-Hao Liu

Assoc. Professor of National Taiwan University, Taiwan

Surface acoustic wave (SAW)-based atomizers have attracted increasing attention for miniaturized aerosol generation due to their compact design, high-frequency operation, and compatibility with MEMS fabrication. In this work, we present a MEMS-based tri-IDT SAW atomizer fabricated on a lithium niobate substrate for generating micro- and submicron aerosols. The device consists of three interdigital transducer pairs arranged with 120° angular separation to provide multidirectional acoustic excitation beneath a sessile liquid droplet. This configuration enables a more distributed acoustic field compared with conventional single-direction SAW atomizers while maintaining a simple driving scheme. Prototype devices were designed, fabricated, and characterized under RF excitation. Stable atomization of DI-water droplets was observed under low-power pulsed operation, producing aerosol droplets over multiple size ranges. The proposed tri-IDT SAW atomizer offers a compact, low-power approach to aerosol generation and shows potential for biomedical aerosol delivery, nanoparticle aerosolization, and portable microfluidic systems.

Design and Integration of a Miniaturized Pneumatic Fingerwith an FPCB-Based Metallic Glass Strain Sensor

Yao-Chuan Tsai

Asst. Professor of National Chung Hsing University, Taiwan

A miniaturized pneumatic finger allows for safer grasping without damaging the surface of an object. A flexible strain sensor was developed and embedded in a miniaturized pneumatic finger to sense the finger’s self-deformation as a feedback control signal. The proposed flexible strain sensor comprised a Zr-based metallic glass sensing material and a flexible printed circuit board (FPCB) substrate. The properties of fabricated strain sensors with different patterns and with metallic glass thin films of different thicknesses were measured. The miniaturized pneumatic finger was fabricated from a highly elastic polymer by demolding. To integrate the flexible strain sensor and the miniaturized pneumatic finger, surface treatment was performed to improve the bonding strength. Measurements of the contact angle and peel-off force reveal that the treated surfaces have lower contact angles and higher bonding strength. This higher bonding strength between the flexible strain sensor and the miniaturized pneumatic finger prevented the destruction of the finger during bending. The developed flexible strain sensor embedded in the miniaturized pneumatic finger could sense the finger’s self-deformation by measuring changes in resistance.

Magnetic Micro/Nano Devices Enabled Novel Applications: From Medical to Computing Applications

Tien-Kan Chung

Professor of National Yang Ming Chiao Tung University, Taiwan

In this talk, I will report our recent progress about using semiconductor/MEMS processing technologies to fabricate special magnetic thin films and micro/nano devices to enable novel applications: form medical to computing applications. We fabricate high permeable NiFe/Metglas and thermomagnetic NiCu/Gd based thin films and micro devices to perform novel multi-functional duties (such as pressure sensing, location targeting, wireless heating & temperature monitoring, robot-assisted endo-scope manipulating, and bead manipulating) for orthodontic, orthopedic, and thoracic applications. Furthermore, from microscale, we step into nanoscale world, investigating special nanomagnetic features in patterned nano-structures and nanodeives, to explore more interesting applications. We fabricate spin-transfer torque based CoFeB and Ni nano devices to perform novel magnetic domain wall’s transforming and manipulating. These not only can be used for above medical bead-manipulation but also can enable magnetic-domain based sequential computing for memory and data storage applications, including cutting-edge AI computing.

3D-Printed Skin-Interfaced Microfluidic Systems for Sweat Collection

Chung-Han Wu

Assist. Professor of National Chung Hsing University, Taiwan

Wearable systems designed to interface with the skin, incorporating microfluidic structures and sensing technologies, offer powerful tools for monitoring biochemical signals. This talk will present a novel approach using recent advancements in additive manufacturing (SLA 3D printing) to develop a unique class of epidermal microfluidic devices. We introduce a 3D-printed platform called the "sweatainer," which leverages the flexibility of 3D design to create fluidic components with complex architectures previously unattainable. This design integrates colorimetric assays for real-time sweat chloride analysis. This sweatainer also enables a "multidraw" sweat collection, allowing for collecting multiple independent sweat samples for on-body or external analysis. Field studies further demonstrate the practical potential of this innovative system and its applicability in everyday use and clinical research.

Rone Chiu

General Manager & CEO of LIDS Semiconductor Technology CO., LTD.

Rone Chiu has 30 years’ experience in semiconductor industry. For over a decade as ASML’s ASIA Training Manager, I localized cutting-edge European lithography technologies, transforming them into the core capabilities of Asia's engineering teams. Leveraging this expertise, I recognized Taiwan’s need for robust system integration to meet next-generation demands. Consequently, I founded LIDS Semiconductor Technology Co., Ltd., successfully guiding it from zero to one over the past five years. At LIDS, we go beyond premium technical services to chart the industry's future. We deliver resilient, ESG-compliant solutions tailored for emerging trends, including advanced packaging, silicon photonics, and net-zero emissions. By elevating local manufacturing ecosystems to top-tier international standards, we have built an irreplaceable technical moat. Reflecting on a 30-year career—from a multinational executive to a startup helmsman—I operate exactly at the intersection of technology and management. Moving forward, I remain dedicated to driving next-generation semiconductor advancements through forward-looking vision and robust global expansion strategies.

Jason Wu

President of Asia Pacific Microsystems, Inc.

Dr. Chien-Hung (Jason) Wu is President of Asia Pacific Microsystems, Inc. (APM), bringing over 20 years of experience in MEMS, sensors, microfabrication, and business development across the United States and Taiwan. Before joining APM, he led technical development of infrared sensor array technologies in the U.S., covering sensor design, process integration, CMOS/MEMS integration, packaging, and failure analysis. Since joining APM in 2014, Dr. Wu has held key roles in technical marketing, business development, and sales, helping expand APM’s MEMS foundry business and strengthen partnerships with global customers. His technical background spans MEMS pressure sensors, optical MEMS, SiC-based microsystems, and sensor commercialization. Dr. Wu holds a PhD in Materials Science & Engineering from Case Western Reserve University and an MBA from Cleveland State University.

Yunwei Lin

Technical Manager, Product Marketing Division of United Microelectronics Corporation (UMC)

Yunwei Lin serves as a Technical Manager in the Product Marketing Division at United Microelectronics Corporation (UMC), bringing over 25 years of extensive semiconductor industry experience. Transitioning from a system-level R&D engineer to a commercial manager, he offers a rare, holistic perspective on foundry business development and strategic marketing. Throughout his tenure at UMC, Mr. Lin has successfully driven business growth across diverse technology segments, notably incorporating and validating strategic suppliers to enable and scale up open, collaborative manufacturing frameworks. His current responsibilities center on capturing emerging market opportunities and formulating business expansion strategies for 8-inch specialty product lines, spanning diverse design architectures and material technologies, including MEMS, Si-based Discretes, and Wide Bandgap (WBG) materials. Mr. Lin holds a B.S. in Electrical Engineering and an M.S. in Electronic Engineering from National Tsing Hua University.

Yu-Ching Lin

CEO of NextQM Inc.

Dr. Yu-Ching Lin is the Founder and CEO of NextQM Inc., with expertise in MEMS, advanced materials, and microsystem packaging. She has over 20 years of international experience spanning academic research, technology development, and technology commercialization. Dr. Yu-Ching Lin received her Ph.D. in Engineering from Tohoku University, Japan, where she later served as an Associate Professor. She was also a Visiting Scholar at the Berkeley Sensor & Actuator Center (BSAC), University of California, Berkeley, and conducted advanced microsystems research at the Fraunhofer Institute for Electronic Nano Systems (ENAS), Germany. In industry, she has held leadership positions including Director of the Advanced Microsystem Research Center at Goertek Technology Japan and Japan Representative of Cardio Ring Technologies (USA). Her current work focuses on next-generation Quartz MEMS, advanced packaging, and enabling technologies for AI infrastructure. She is dedicated to bridging academic innovation and industrial applications while accelerating the commercialization of deep-tech innovations.

Wan-Thai Hsu

CTO of Soundskrit

Dr. Wan-Thai Hsu has 30 years of experience in MEMS. He received a Ph.D. in Electrical Engineering and an MBA from the University of Michigan. Over the past 25 years, he has brought multiple MEMS devices from groundbreaking university research to hundred million units of commercial products that we are using today.He won several prestigious awards, such as the EE Times ACE Innovator of the Year Award (2007), Wall Street Journal Innovation Award (2007), and IEEE CB Sawyer Award (2015). He has held various positions of critical importance in startups as well as publicly traded companies, including CTO of Discera, CTO of MEMS at Micrel (now Microchip), CTO of TXC, CEO of Siliconquartz. On the service side, he chaired the annual IEEE Frequency Control Symposium in 2014, the decennial IEEE UFFC Joint Symposium in 2024, and served in many technical and industrial committees.

Currently, Dr. Hsu is the Chief Technology Officer at Soundskrit - commercializing bio-inspired MEMS directional microphones and audio systems, and the Chairman of the Board at Stathera which aims to develop highly stable MEMS oscillators. Under his leadership, Soundskrit was named the top 100 startups to watch by EE Times in 2023 and 2024 consecutively, and Stathera was named in the same category in 2025.

Hiroyuki Fujita

Tokyo City University, Japan [1], National Tsing Hua University, Taiwan [2]

Dr. Hiroyuki Fujita is Yushan Honorary Chair Professor, iNEMS, Taiwan National Tsing Hua University and Distinguished Professor of Tokyo City University in Tokyo, Japan. He received Ph.D. degree in electrical engineering from The University of Tokyo, Japan, in 1980. He worked in Institute of Industrial Science of The University of Tokyo as a Faculty member (Lecturer, Assistant Professor and Professor) until 2018. He served as Founding Director of Advanced Research Laboratory, CANON Medical Systems Corporation, Japan from 2017 to 2023. He has investigated MEMS from 1987, covering the design and fabrication of MEMS and applications to optics, biotechnology, nanotechnology and IoT. He has published more than 450 academic papers. Dr. Fujita received many awards, including French l’Ordre des Palmes Academiques, Prize for Science and Technology from MEXT in Japan, and IEEE Robert Bosch Award for MEMS.

Yoshio Mita

The University of Tokyo, Japan

Dr. Yoshio Mita received the B.E., M.E., and Ph.D. degrees from the Department of Electrical and Electronic Engineering, UTokyo, in 1995, 1997, and 2000, respectively. He was an Assistant Professor with the VLSI Design and Education Center (VDEC), UTokyo, and was promoted to a Lecturer in 2001, an Associate Professor in 2005, and a Professor in 2022, all at the Department of Electrical Engineering. He is currently a Professor with the Department of Electrical Engineering and Information Systems, The University of Tokyo, Japan. He has been the Co-Principal Investigator (PI) of the Intelligent Semiconductor Microdevices Laboratory (SML) since 2002 and single PI since 2013 and the Leader of UTokyo’s open nanotechnology platform federal class-1 supercleanroom. Until now, he has been co-(and first-) authored 76 journal articles and 161 international conferences (117 IEEE sponsored), including four keynote talk and 13 invited talks. His research interests include CMOS and MEMS integration technology. In 2021, he was awarded as Senior Member from IEE, Japan, in 2021. He served as the General Co-Chair for Transducers in 2021.

Takehiko Kitamori

National Tsing Hua University, Taiwan

Dr. Takehiko Kitamori received his BS degree in the Department of Pure and Applied Science in 1980 and his Ph.D. degree in engineering in 1989, both from The University of Tokyo. Dr. Kitamori is Yushan Honorary Chair Professor (2020-present). Before joining the NTHU, he was Vice President of the University of Tokyo, responsible for Human Resource Development and Internationalization (2012-14), Dean of Faculty and Graduate School of Engineering (2010-12), and a researcher at Hitachi's Energy Research Lab (1980-89). He is the author of more than 300 journal papers and has written over 50 book chapters. His research areas are Micro/Extended-Nano Fluidics, Extended-Nano Space Chemistry, Applied Laser Spectroscopy for Analytical Chemistry, and Large-scale Parallelizing of Microfluidic Systems

Inkyu Park

KAIST, Korea

Dr. Inkyu Park received his B.S., M.S., and Ph.D. from KAIST (1998), UIUC (2003), and UC Berkeley(2007), respectively, all in mechanical engineering. He has been with the department of mechanicalengineering at KAIST since 2009 as a faculty and is currently a full professor, vice department head, andKAIST Endowed Chair Professor. His research interests are nanofabrication, smart sensors for health-care, environmental and biomedical monitoring, nanomaterial-based sensors, and flexible & wearableelectronics. He has published more than 206 international journal articles (SCI indexed) and holdsmore than 50 registered domestic and international patents in the area of MEMS/NANO engineering.

Sheng-Hsiang Tseng

Taiwan Semiconductor Research Institute (TSRI), Taiwan

Dr. Sheng-Hsiang Tseng received his Ph.D. from the Institute of Electronics Engineering at National Tsing Hua University in Hsinchu, Taiwan. He is currently a Research Fellow and the Director of the Chip Implementation Service Division at the Taiwan Semiconductor Research Institute (TSRI) in Hsinchu, Taiwan. His research interests include CMOS-based MEMS ICs, MEMS technologies, piezoelectric MEMS, RF MEMS, heterogeneous chip integration, and advanced packaging technologies. He has contributed to the development and delivery of courses for the Taiwan–Europe IC Design Program, as well as to the cultivation of talent in advanced FinFET IC design technologies. He has received multiple awards from the National Institutes of Applied Research (NIAR) in recognition of his outstanding contributions to science and technology. Dr. Tseng received the Young Engineer Award from the Taiwan Nanotechnology and Micro System Association (NMA) in 2022. He served on the Technical Committee on Sensors, MEMS, and Bioelectronics (SMB) of the IEEE International Electron Devices Meeting (IEDM) from 2021 to 2022. He currently serves as the Secretary- General of the NMA in Taiwan.

A Stomach-Acid-Charged Tablet-Type Digital Pill with In-Body Monitoring

Kiichi Niitsu

Kyoto University, Japan

Dr. Kiichi Niitsu is a Professor in the Department of Informatics, Graduate School of Informatics, Kyoto University, Japan. He received his B.S., M.S., and Ph.D. degrees in Electrical Engineering from Keio University. His research focuses on low-power and high-speed VLSI circuits, biomedical integrated systems, and energy-efficient sensing technologies for healthcare applications. He has made significant contributions to biomedical circuits and systems, wearable and implantable devices, and next-generation healthcare electronics. His work bridges integrated circuit design, information technology, and biomedical engineering to enable advanced intelligent healthcare systems.

Development and In Vivo Telemetry Demonstration of Ingestible Polyaniline-Based Conductometric pH Sensor

Shinya Yoshida

Shibaura Institute of Technology, Japan

Dr. Shinya Yoshida is a Professor at Shibaura Institute of Technology, Japan. He received his Ph.D. in Engineering from Tohoku University and has extensive experience in MEMS, piezoelectric MEMS, micro/nano fabrication, and biomedical devices. His research focuses on the development of advanced microsystems, ultrasonic transducers, inertial sensors, and ingestible sensing devices for healthcare applications. By integrating microfabrication technologies with biomedical engineering, he contributes to innovative sensing platforms that bridge MEMS technology and next-generation medical diagnostics.

Design of Chemical Transducers for Bioorthogonal Signaling

Kosuke Dodo

RIKEN, Japan

Dr. Kosuke Dodo is a Senior Research Scientist at RIKEN, Japan. He received his Ph.D. in Engineering and conducts interdisciplinary research at the interface of chemical biology, molecular imaging, and biomedical science. His research focuses on the development of functional molecular probes, Raman imaging technologies, and analytical methods for visualizing and quantifying biological processes in living systems. By integrating chemistry, biology, and advanced imaging techniques, he has contributed to a deeper understanding of cellular functions, disease mechanisms, and the development of innovative diagnostic and therapeutic technologies.

Engineering signaling systems of plant hormones as triggers and readouts of in-body avatar cells

Shigeo S Sugano

National Institute of Advanced Industrial Science and Technology, Japan

Dr. Shigeo Sugano is a Chief Senior Researcher at the National Institute of Advanced Industrial Science and Technology (AIST), Japan. He received his D.Sc. in Plant Molecular Biology from Kyoto University. His research focuses on molecular biology, genome engineering, biotechnology, and plant sciences, with applications ranging from gene regulation and genome editing to advanced biomanufacturing. He is also involved in interdisciplinary collaborations that integrate microfluidics, bioengineering, and single-cell technologies to address challenges in life science research and biotechnology.

Avatar cells production based on electromechanical poration by electrically induced bubbles

Yoko Yamanishi

Kyushu University, Japan

Dr. Yoko Yamanishi is a Distinguished Professor in the Department of Mechanical Engineering at Kyushu University, Japan. She received her Ph.D. in Mechanical Engineering from Imperial College London, UK. Her research focuses on biomedical fluid engineering, microfluidics, BioMEMS, multiphase microflows, and bubble-based biomedical technologies. She has pioneered innovative approaches in microbubble generation, plasma–liquid interactions, and biomedical delivery systems. Dr. Yamanishi currently serves as a principal member of JST CREST and as a Program Manager of the Japan Moonshot Program, leading interdisciplinary research at the interface of engineering, biology, and medicine.

Droplet-Based Microfluidic Platform for Time-Lapse Monitoring of Cellular Responses to Nano-Artifact Exposure

Shinya Sakuma

Kyushu University, Japan

Dr. Shinya Sakuma is an Associate Professor in the Department of Mechanical Engineering at Kyushu University, Japan. His research focuses on microfluidics, micro/nano robotics, MEMS, and single-cell analysis. He has developed innovative microfluidic systems for cell sorting, manipulation, fusion, and analysis, as well as microscale robotic technologies for biomedical applications. His work bridges microengineering and life sciences, contributing to the advancement of lab-on-a-chip systems, microTAS technologies, and next-generation biomedical devices.

Cyto-Transducers for Visualization of Designed Cell-Cell Communications

Niko Kimura

Tokyo University of Agriculture and Technology, Japan

Dr. Niko Kimura is a Senior Assistant Professor in the Division of Advanced Mechanical Systems Engineering at Tokyo University of Agriculture and Technology (TUAT), Japan. She received her M.S. and Ph.D. degrees in Engineering from Hokkaido University and was awarded a JSPS Research Fellowship for Young Scientists (DC1). Prior to joining TUAT, she served as an Assistant Professor at Kyushu University. Her research interests include micro/nano engineering, advanced materials, and microsystem technologies, with applications in sensing and interdisciplinary engineering systems.

Optical Immunotransducer as an Evaluation Platform for Designed Cell-Cell Communication

Yoshitaka Shirasaki

The University of Tokyo, Japan

Dr. Yoshitaka Shirasaki is an Associate Professor at the Research Center for Advanced Science and Technology, The University of Tokyo, Japan. He received his Ph.D. in Science from Waseda University and has held research positions at RIKEN and The University of Tokyo. His research focuses on microfluidics, single-cell analysis, bioimaging, and quantitative life sciences. He has developed innovative microsystem technologies for studying cellular functions, protein secretion, and immune responses, contributing to the integration of micro/nano engineering with biomedical and life science applications.

Construction of Bio-Fate: A Platform Integrating Live-Cell Phenotypic Profiling and Precision Manipulation

Takashi Kamatani

Japanese Foundation for Cancer Research, Japan

Dr. Takashi Kamatani is a Junior Associate Professor in the Division of AI and Big Data Research at the Institute of Science Tokyo, Japan. He received his medical degree from Keio University and is both a physician and biomedical researcher. His research integrates genomics, cancer immunology, artificial intelligence, and big-data analytics to advance precision medicine. Dr. Kamatani has contributed to studies on tumor microenvironments, immunotherapy, regenerative medicine, and AI-assisted medical diagnosis, bridging clinical medicine with computational and biomedical engineering approaches.

Photopatternable Drying-Resistant Conductive Hydrogel Integrated into Organ Models for Functional Evaluation of In-body Cybernetic Avatars

Hisataka Maruyama

Nagoya University, Japan

Dr. Hisataka Maruyama is an Associate Professor in the Graduate School of Engineering at Nagoya University, Japan. He received his Ph.D. in Micro-Nano Systems Engineering from Nagoya University. His research focuses on microfluidics, micro/nano robotics, bioMEMS, microsensors, and biomedical engineering. He has developed innovative technologies for single-cell analysis, microenvironment sensing, microscale manipulation, and biomedical devices. His interdisciplinary work integrates micro/nano engineering with life sciences and medicine, contributing to advances in lab-on-a-chip systems, biosensing, and healthcare applications.

Capsule for Intestinal Surface Sampling: Sealing Mechanism for Preventing Cross-Contamination of Collected Samples

Huaiyi Zhang

The University of Tokyo, Japan

Huaiyi Zhang is a graduate student in the Department of Precision Engineering at The University of Tokyo, Japan, under the supervision of Prof. Fumihito Arai. Their research focuses on biomedical microdevices, microfluidic systems, and ingestible technologies for healthcare applications. Current research interests include the development of capsule-based devices for gastrointestinal sampling and analysis, with an emphasis on reliable sample collection and the prevention of cross-contamination. Through the integration of microengineering and biomedical technologies, their work aims to advance minimally invasive diagnostic tools for future healthcare and medical research.

On-Chip Biomimetic Platform for Functional Evaluations of Avatar Cells

Takeshi Hayakawa

Chuo University, Japan

Dr. Takeshi Hayakawa is a Professor in the Faculty of Science and Engineering at Chuo University, Japan. He received his Ph.D. in Engineering from Nagoya University and previously held academic positions at Nagoya University and Kyushu University. His research focuses on micro/nano systems, biomedical engineering, microrobotics, soft actuators, and microfluidic technologies for cell manipulation and analysis. He has made significant contributions to the development of microsystems and robotic platforms for biomedical applications and interdisciplinary engineering research.

A Pyramidal Nanopore for ssDNA Sequencing

Jianxin Yang

The Chinese University of Hong Kong, Hong Kong, China

Dr. Jianxin Yang received his Ph.D. in Biomedical Engineering from The Chinese University of Hong Kong (CUHK) in 2024. He subsequently conducted postdoctoral research at CUHK from 2025 onward, previously serving as a Research Assistant at CUHK between 2024 and 2025. His research focuses on nanopore sensing, microfluidics, lab-in-a-tube platforms, and molecular sensors. He has published dozens of peer-reviewed journal papers (with an h-index of 10). His contributions have been recognized with several honors, including the National Scholarship of China (2018) and the Outstanding Tutor Award from CUHK (2024).

Advanced Energy Materials and Devices for Low-grade Heat Harvesting and Flexible Thermal Sensing

Dongyan Xu

The Chinese University of Hong Kong, Hong Kong SAR, China

Prof. Dongyan Xu is currently a Professor in the Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong. Prof. Xu received her Bachelor, Master, and Ph.D. degrees from Tsinghua University and Vanderbilt University. After that, she worked as a Postdoc in the University of California, Berkeley and Lawrence Berkeley National Laboratory for two years. She joined CUHK in 2010 as an Assistant Professor and was promoted to Associate Professor in 2016 and Professor in 2022. Her current research interests include flexible tactile and thermal sensors, thermoelectric materials and devices, thermogalvanic cells, ionic thermoelectric materials, nanoscale thermal transport, and boiling heat transfer.

Microfluidic Encapsulation Strategies for Tissue Engineering and Regenerative Medicine

Hon Fai Chan

Chinese University of Hong Kong, Hong Kong SAR, China

Prof. Hon Fai Chan is an Associate Professor at the School of Biomedical Sciences and the Institute for Tissue Engineering and Regenerative Medicine at The Chinese University of Hong Kong (CUHK). He received his Bachelor degree from the University of Hong Kong, before pursuing his Ph.D. degree at Duke University. During 2015-2017, he worked as a postdoctoral researcher at Columbia University and Massachusetts Institute of Technology before joining CUHK in 2018. Prof. Chan’s research mainly focuses on advancing biofabrication approach and biomaterial design for stem cell tissue engineering and regenerative medicine, as well as understanding how microenvironmental cues influence stem cell proliferation and differentiation. He has published more than 70 SCI-indexed papers in journals such as PNAS, Science Advances, Nature Communications, Advanced Materials, Advanced Science, and Biomaterials.

MusTer: A Generalizable Microfluidic Platform Combining Multi-Parametric Droplet Sorting and Multi-Droplet Merging in Single-Cell Sequencing

Guangyao Cheng

The Chinese University of Hong Kong, Hong Kong SAR, China

Dr. Guangyao Cheng is currently a Postdoctoral Fellow in the Department of Biomedical Engineering at The Chinese University of Hong Kong (CUHK). He received his B.E. from Sun Yat-Sen University and his Ph.D. in Biomedical Engineering from CUHK, where he pioneered photo-responsive fluorosurfactants for light-driven droplet manipulation. Bridging academic research and industrial application, Dr. Cheng previously worked as an Instrument Development Engineer at MGI for developing microfluidics-based high-throughput enzyme evolution platforms. His current research focuses on advancing droplet microfluidics for biochemical applications, including ultrafast PCR and single-cell analysis. He has authored 18 peer-reviewed articles, holds 3 patents, and was recognized with the CBMS LMIC Young Researcher Award at µTAS 2021.

Deformability Cytometry for Noninvasive High-throughput Characterization of Cells

Megan Yi-Ping Ho

The Chinese University of Hong Kong, Hong Kong

Yi-Ping (Megan) Ho is currently a Professor, the Vice Chairman (Research) and the MSc Program Director in the Department of Biomedical Engineering at The Chinese University of Hong Kong. She received her B.S. and M.S. in Power Mechanical Engineering from National Tsing-Hua University, Taiwan. She received her Ph.D. in Mechanical Engineering from the Johns Hopkins University. After her postdoctoral training at the Department of Biomedical Engineering in Duke University, she received the Young Elite Researcher Award from the Danish Research Council and started her independent career in the Interdisciplinary Nanoscience Centre and the Department of Molecular Biology and Genetics at Aarhus University in Denmark. She has published 92 peer-reviewed journal articles, 7 book chapters, 92 conference papers, edited 1 book and holds 7 granted patents. The results that she presented have been recognized internationally by the American Society of Gene Therapy and Controlled Release Society. Her research is focused on developing nanosensors and microfluidics as diagnostic tools to expand the capacity of disease detection and treatment evaluation.